For citations:
Timoshenkov S.P., Kalugin V.V., Parfenov N.M., Antchutin S.A., Kochurina E.S., Mukimov D.W., Jo Had Aung Research and Development of the Methods for Estimation of the Basic Parameters of the Micromechanical Transducers of Linear Acceleration. Mekhatronika, Avtomatizatsiya, Upravlenie. 2015;16(6):422-426. (In Russ.) https://doi.org/10.17587/mau.16.422-425