Structural Schemes and Structural-Parametric Models of Electroelastic Actuators for Nanomechatronics Systems

The parametric structural schemes, structural-the parametric models and the transfer functions of the electroelastic actuators for the nanomechatronics systems are obtained. The transfer functions of the piezoactuator are determined under the generalized piezoelectric effect. The changes in the elastic compliance and the stiffness of the piezoactuator are found, taking into account the type of control. The decision wave equation and the structural-parametric models of the electroelastic actuators are obtained. Effects of the geometric and physical parameters of the electroelastic actuators and the external load on its static and dynamic characteristics are determined. The parameteric structural schemes for the electroelastic actuators for the nanomechatronics systems are obtained. The transfer functions are determined. For calculation of the automatic control systems for the nanometric movements with the electroelastic actuators are obtained the parametric structural schemes and the transfer functions of actuators. Static and dynamic characteristics of the electroelastic actuators are determined. The application of electroelastic actuators solves problems of the precise matching in microelectronics and nanotechnology, compensation of temperature and gravitational deformations, atmospheric turbulence by wave front correction. By solving the wave equation with allowance for the corresponding equations of the piezoelectric effect, the boundary conditions on loaded working surfaces of the electroelastic actuator, the strains along the coordinate axes, it is possible to construct the structural parametric model of the actuator. The transfer functions and the parametric structural schemes of the electroelastic actuator are obtained from the equations describing the corresponding structural parametric models and taking into account the opposed electromotive force of the electroelastic actuator for the nanomechatronics systems.

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