Research of Gap Mechatronic Stabilization System of Scanning Profilometer of Optical Non-contact Approximation Transducer

Abstract

The article describes the structure of the mechatronic system stabilization gap and mathematical model of non-contact optical approximation transducer based on optical tunneling effect. Today so-called scanning atomic force microscopes (AFM) are widely used. The main disadvantage of AFM is very small working gap (about 10 nm to several picometers), that could cause damage to the object of measurement, breakage of the scanning head (needle), but also to inaccuracies in the model. Foreign and domestic scientists and researchers have proposed different approaches to solve this problem. In this paper we considered the option of constructing a model with a scanning profilometer with a larger gap. Reflectivity of the transducer depending upon various design factors such as initial gap, radius of the sphere, size of the sphere is calculated and described. It is shown, that the dependence increase the radius of the sphere and the refractive index of the material of it, in case of reducing the size of a segment of the sphere and numerical apertures, leads to reduction of integral output power. Estimation of intermolecular interaction forces occurred with inverter operation approximation showed that their influence effect can be neglected. The proposed approximation transducer can be effectively used for other measurement of mechanical values, driven to nanoparanoia, such as accelerations, speeds, forces etc.