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<article article-type="research-article" dtd-version="1.3" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xml:lang="ru"><front><journal-meta><journal-id journal-id-type="publisher-id">novtexmech</journal-id><journal-title-group><journal-title xml:lang="ru">Мехатроника, автоматизация, управление</journal-title><trans-title-group xml:lang="en"><trans-title>Mekhatronika, Avtomatizatsiya, Upravlenie</trans-title></trans-title-group></journal-title-group><issn pub-type="ppub">1684-6427</issn><issn pub-type="epub">2619-1253</issn><publisher><publisher-name>Commercial Publisher «New Technologies»</publisher-name></publisher></journal-meta><article-meta><article-id custom-type="elpub" pub-id-type="custom">novtexmech-110</article-id><article-categories><subj-group subj-group-type="heading"><subject>Research Article</subject></subj-group><subj-group subj-group-type="section-heading" xml:lang="ru"><subject>АВТОМАТИЗАЦИЯ УПРАВЛЕНИЯ ТЕХНИЧЕСКИМИ ОБЪЕКТАМИ И ТЕХНОЛОГИЧЕСКИМИ ПРОЦЕССАМИ</subject></subj-group><subj-group subj-group-type="section-heading" xml:lang="en"><subject>CONTROL AUTOMATION FOR TECHNOLOGICAL OBJECTS AND PROCESSES</subject></subj-group></article-categories><title-group><article-title>Исследование бесконтактного оптического преобразователя приближения мехатронной системы стабилизации зазора сканирующего профилометра</article-title><trans-title-group xml:lang="en"><trans-title>Research of Gap Mechatronic Stabilization System of Scanning Profilometer of Optical Non-contact Approximation Transducer</trans-title></trans-title-group></title-group><contrib-group><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Бусурин</surname><given-names>В. И.</given-names></name><name name-style="western" xml:lang="en"><surname>Busurin</surname><given-names>V. I.</given-names></name></name-alternatives><email xlink:type="simple">vibusurin@mega.ru</email><xref ref-type="aff" rid="aff-1"/></contrib><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Лю Чже</surname></name><name name-style="western" xml:lang="en"><surname>Liu Zhe</surname></name></name-alternatives><email xlink:type="simple">noemail@neicon.ru</email><xref ref-type="aff" rid="aff-1"/></contrib><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Ахламов</surname><given-names>П. С.</given-names></name><name name-style="western" xml:lang="en"><surname>Akhlamov</surname><given-names>P. S.</given-names></name></name-alternatives><email xlink:type="simple">pakhlamov@hotmail.com</email><xref ref-type="aff" rid="aff-1"/></contrib><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Бердюгин</surname><given-names>Н. А.</given-names></name><name name-style="western" xml:lang="en"><surname>Berdjugin</surname><given-names>N. A.</given-names></name></name-alternatives><email xlink:type="simple">ber.nikolaj2012@yandex.ru</email><xref ref-type="aff" rid="aff-1"/></contrib></contrib-group><aff-alternatives id="aff-1"><aff xml:lang="ru">Московский авиационный институт (Национальный исследовательский университет)<country>Россия</country></aff><aff xml:lang="en">Moscow Aviation Institute (National Research University)<country>Russian Federation</country></aff></aff-alternatives><pub-date pub-type="collection"><year>2015</year></pub-date><pub-date pub-type="epub"><day>28</day><month>08</month><year>2018</year></pub-date><volume>16</volume><issue>1</issue><fpage>43</fpage><lpage>47</lpage><permissions><copyright-statement>Copyright &amp;#x00A9; Commercial Publisher «New Technologies», 2018</copyright-statement><copyright-year>2018</copyright-year><copyright-holder xml:lang="ru">Commercial Publisher «New Technologies»</copyright-holder><copyright-holder xml:lang="en">Commercial Publisher «New Technologies»</copyright-holder><license xlink:href="https://mech.novtex.ru/jour/about/submissions#copyrightNotice" xlink:type="simple"><license-p>https://mech.novtex.ru/jour/about/submissions#copyrightNotice</license-p></license></permissions><self-uri xlink:href="https://mech.novtex.ru/jour/article/view/110">https://mech.novtex.ru/jour/article/view/110</self-uri><abstract><p>Рассмотрена структура системы стабилизации зазора сканирующего профилометра с бесконтактным оптическим преобразователем приближения на основе оптического туннелирования, который может быть дополнением к широко применяющимся сканирующим атомно-силовым и туннельным микроскопам, главным недостатком которых является малый рабочий зазор (расстояние от тела до сканирующей иглы), что может привести к повреждению поверхности тела или к поломке сканирующей иглы. Предложена математическая модель преобразователя приближения на основе оптического туннелирования с рабочим диапазоном в сотни нанометров и проведено исследование отражательной способности преобразователя при различных конструктивных параметрах.</p></abstract><trans-abstract xml:lang="en"><p>The article describes the structure of the mechatronic system stabilization gap and mathematical model of non-contact optical approximation transducer based on optical tunneling effect. Today so-called scanning atomic force microscopes (AFM) are widely used. The main disadvantage of AFM is very small working gap (about 10 nm to several picometers), that could cause damage to the object of measurement, breakage of the scanning head (needle), but also to inaccuracies in the model. Foreign and domestic scientists and researchers have proposed different approaches to solve this problem. In this paper we considered the option of constructing a model with a scanning profilometer with a larger gap. Reflectivity of the transducer depending upon various design factors such as initial gap, radius of the sphere, size of the sphere is calculated and described. It is shown, that the dependence increase the radius of the sphere and the refractive index of the material of it, in case of reducing the size of a segment of the sphere and numerical apertures, leads to reduction of integral output power. Estimation of intermolecular interaction forces occurred with inverter operation approximation showed that their influence effect can be neglected. The proposed approximation transducer can be effectively used for other measurement of mechanical values, driven to nanoparanoia, such as accelerations, speeds, forces etc.</p></trans-abstract><kwd-group xml:lang="ru"><kwd>первичный преобразователь</kwd><kwd>профилометр</kwd><kwd>система стабилизации</kwd><kwd>зазор</kwd><kwd>оптическое туннелирование</kwd><kwd>функция преобразования</kwd><kwd>фотоприемник</kwd><kwd>transducer</kwd><kwd>profilometer</kwd><kwd>mechatronic system</kwd><kwd>optical tunneling</kwd><kwd>conversion function</kwd></kwd-group></article-meta></front><back><ref-list><title>References</title><ref id="cit1"><label>1</label><citation-alternatives><mixed-citation xml:lang="ru">Gross L., Mohn F., Moll N., Liljeroth P., Meyer G. The Chemical Structure of a Molecule Resolved by Atomic Force Microscopy // Science. 2009. № 325 (5944). P. 1110-1114.</mixed-citation><mixed-citation xml:lang="en">Gross L., Mohn F., Moll N., Liljeroth P., Meyer G. The Chemical Structure of a Molecule Resolved by Atomic Force Microscopy // Science. 2009. № 325 (5944). P. 1110-1114.</mixed-citation></citation-alternatives></ref><ref id="cit2"><label>2</label><citation-alternatives><mixed-citation xml:lang="ru">Бусурин В. И., Князь В. А., Ходин М. М., Скрипник Н. П. Сканирующий профилометр для измерения профиля цилиндрических тел. // Мехатроника, автоматизация, управление. 2010. № 2 (107). С. 36-42.</mixed-citation><mixed-citation xml:lang="en">Бусурин В. И., Князь В. А., Ходин М. М., Скрипник Н. П. Сканирующий профилометр для измерения профиля цилиндрических тел. // Мехатроника, автоматизация, управление. 2010. № 2 (107). С. 36-42.</mixed-citation></citation-alternatives></ref><ref id="cit3"><label>3</label><citation-alternatives><mixed-citation xml:lang="ru">Бори М., Вольф Э. Основы оптики. 2-е изд. М.: Наука, 1972.</mixed-citation><mixed-citation xml:lang="en">Бори М., Вольф Э. Основы оптики. 2-е изд. М.: Наука, 1972.</mixed-citation></citation-alternatives></ref></ref-list><fn-group><fn fn-type="conflict"><p>The authors declare that there are no conflicts of interest present.</p></fn></fn-group></back></article>
